Improved effective mobility extraction in MOSFETs

The standard method of extracting carrier effective mobility from electrical measurements on MOSFETs is reviewed and the assumptions implicit in this method are discussed. A novel technique is suggested that corrects for the difference in drain bias during IV and CV measurements. It is further shown that the lateral field and diffusion corrections, which are both commonly neglected, in fact cancel. The effectiveness of the proposed technique is demonstrated by application to data measured on a quasi-planar SOI finFET at 300 K and 4 K

Electronic and material properties of MOS-gated Si/Si_1_-_xGe_x P-channel heterostructures

SIGLEAvailable from British Library Document Supply Centre-DSC:DXN020690 / BLDSC - British Library Document Supply CentreGBUnited Kingdo

FinFET Mismatch in Subthreshold Region: Theory and Experiments

In this paper, we study the drain-current mismatch of FinFETs in subthreshold, from both modeling and experimental point of view. We propose a simple model that takes into account the effect of threshold voltage and subthreshold swing fluctuations and their correlation. For long-channel devices (longer than a critical length LC), characterized by a subthreshold swing close to the ideal value, the overall current mismatch is dominated by threshold voltage fluctuations and, therefore, is gate voltage independent. The subthreshold swing fluctuations give a negligible effect on the drain-current mismatch and are uncorrelated with the threshold voltage fluctuations. For short-channel devices (shorter than a critical length LC), characterized by a strong dependence of subthreshold swing on the channel length, the overall current mismatch presents an additional relevant contribution associated with the subthreshold swing fluctuations. This component depends on the gate voltage overdrive and is ascribed to the gate line edge roughness, resulting in a partial correlation between threshold voltage and subthreshold swing fluctuations